Shanghai Micro Elec-tronics Equipment Co., Ltd (SMEE), a Hi-Tech Joint Venture formed by several large groups and investment companies, is mainly engaged in designing,developing, manufacturing, marketing & sales of advanced semiconductor manufacturing equipments. SMEE also provides services in maintenance, repair and refurbishment of IC Lithography tools.

SMEE's plant has 5000 sq.m R&D area and 3000 sq.m clean room including 100 grades, 1000 grades and 10000 grades, where SMEE can carry out assembly, integration and testing of Semiconductor Manufacturing Equipments, especially the Lithography tools.

Lithography

• Scanner
• Stepper

Temperature Control Unit

• temperature range 0°C - 60°C
• temperature precision ± 0.01°C

PCB Card

• specialized for collect high precision
• pcb card based on VME-BUS