In the year 2000 our first local scrubber were sold in China.

Now more than 80 abatement units are operating in most of the leading semiconductor fabs all over China.

With our great success and a rapid growing market in the last years, we now consider setting up a local production for DAS local scrubber systems in China. Our strength is providing state of the art technology and extremely high quality standards.

Thereby would be ideal a joint venture partner whose intention is adapting to German high quality standards in order to manufacture local scrubber. To consolidate our activities in China we want a cooperation partner for joint developments, sales, service and customer support. We are focusing on a long term relationship build on mutual understanding and trust.

Technology for Applications

ESCAPE

Burn and Wet Technology

• etching
• diffusion
• thin film
• PFC reduction

AQUABATE

Wet Technology

• etching
• epaitaxy
• thin film
• diffusion

GIANT

Burn, Wet and Trap Technology

• Flat panel Generation 4",5" ,6" ,7" ,8"
• Solar cell production